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EU-Förderung (1.787.475 €): Dampfabscheidung von kristallinen porösen Feststoffen Hor11.11.2016 EU-Rahmenprogramm für Forschung und Innovation "Horizont"
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Dampfabscheidung von kristallinen porösen Feststoffen
Metal-organic frameworks (MOFs) are crystalline solids with highly regular pores in the nanometer range. The possibility to create a tailored nano-environment inside the MOF pores makes these materials high-potential candidates for integration with microelectronics, e.g. as sensor coatings, solid electrolytes, etc. However, current solvent-based methods for MOF film deposition, a key enabling step in device integration, are incompatible with microelectronics fabrication because of contamination and corrosion issues. VAPORE will open up the path to integrate MOFs in microelectronics by developing a solvent-free chemical vapor deposition (CVD) route for MOF films. MOF-CVD will be the first example of vapor-phase deposition of any type of microporous crystalline network solid and marks an important milestone in processing such materials. Development of the MOF-CVD technology platform will start from a proof-of-concept case and will be supported by the following pillars: (1) Insight in the process, (2) expansion of the materials scope and (3) fine-tuning process control. The potential of MOF-CVD coatings will be illustrated in proof-of-concept sensors. In summary, by growing porous crystalline films from the vapor phase for the first time, VAPORE implements molecular self-assembly as a scalable tool to fabricate highly controlled nanopores. In doing so, the project will enable cross-fertilization between the worlds of nanoscale chemistry and microelectronics, two previously incompatible fields.
Geförderte Unternehmen:
| Firmenname | Förderungssumme |
| Katholieke Universiteit Leuven | 1.787.475 € |
Quelle: https://cordis.europa.eu/project/id/716472
Diese Bekanntmachung wurde von Englisch nach Deutsch übersetzt. Die Bekanntmachung bezieht sich auf einen vergangenen Zeitpunkt, und spiegelt nicht notwendigerweise den heutigen Stand wider. Der aktuelle Stand wird auf folgender Seite wiedergegeben: Katholieke Universiteit Leuven privaatrechtelijke rechtspersoon, Leuven, Belgien.